Piezoelectric Transducers Based on Aluminum Nitride and Polyimide for Tactile Applications

The development of micro systems with smart sensing capabilities is paving the way to progresses in the technology for humanoid robotics. The importance of sensory feedback has been recognized the enabler of a high degree of autonomy for robotic systems. In tactile applications, it can be exploited not only to avoid objects slipping during their manipulation but also to allow safe interaction with humans and unknown objects and environments. In order to ensure the minimal deformation of an object during subtle manipulation tasks, information not only on contact forces between the object and fingers but also on contact geometry and contact friction characteristics has to be provided. Touch, unlike other senses, is a critical component that plays a fundamental role in dexterous manipulation capabilities and in the evaluation of objects properties such as type of material, shape, texture, stiffness, which is not easily possible by vision alone. Understanding of unstructured environments is made possible by touch through the determination of stress distribution in the surrounding area of physical contact. To this aim, tactile sensing and pressure detection systems should be integrated as an artificial tactile system. As illustrated in the Chapter I, the role of external stimuli detection in humans is provided by a great number of sensorial receptors: they are specialized endings whose structure and location in the skin determine their specific signal transmission characteristics. Especially, mechanoreceptors are specialized in the conversion of the mechanical deformations caused by force, vibration or slip on skin into electrical nerve impulses which are processed and encoded by the central nervous system. Highly miniaturized systems based on MEMS technology seem to imitate properly the large number of fast responsive mechanoreceptors present in human skin. Moreover, an artificial electronic skin should be lightweight, flexible, soft and wearable and it should be fabricated with compliant materials. In this respect a big challenge of bio-inspired technologies is the efficient application of flexible active materials to convert the mechanical pressure or stress into a usable electric signal (voltage or current). In the emerging field of soft active materials, able of large deformation, piezoelectrics have been recognized as a really promising and attractive material in both sensing and actuation applications. As outlined in Chapter II, there is a wide choice of materials and material forms (ceramics: PZT; polycrystalline films: ZnO, AlN; polymers and copolymers: PVDF, PVDF-TrFe) which are actively piezoelectric and exhibit features more or less attractive. Among them, aluminum nitride is a promising piezoelectric material for flexible technology. It has moderate piezoelectric coefficient, when available in c-axis oriented polycrystalline columnar structure, but, at same time, it exhibits low dielectric constant, high temperature stability, large band gap, large electrical resistivity, high breakdown voltage and low dielectric loss which make it suitable for transducers and high thermal conductivity which implies low thermal drifts. The high chemical stability allows AlN to be used in humid environments. Moreover, all the above properties and its deposition method make AlN compatible with CMOS technology. Exploiting the features of the AlN, three-dimensional AlN dome-shaped cells, embedded between two metal electrodes, are proposed in this thesis. They are fabricated on general purpose Kapton™ substrate, exploiting the flexibility of the polymer and the electrical stability of the semiconductor at the same time. As matter of fact, the crystalline layers release a compressive stress over the polymer, generating three-dimensional structures with reduced stiffness, compared to the semiconductor materials. In Chapter III, a mathematical model to calculate the residual stresses which arise because of mismatch in coefficient of thermal expansion between layers and because of mismatch in lattice constants between the substrate and the epitaxially grown films is adopted. The theoretical equation is then used to evaluate the dependence of geometrical features of the fabricated three-dimensional structures on compressive residual stress. Moreover, FEM simulations and theoretical models analysis are developed in order to qualitative explore the operation principle of curved membranes, which are labelled dome-shaped diaphragm transducers (DSDT), both as sensors and as piezo-actuators and for the related design optimization. For the reliability of the proposed device as a force/pressure sensor and piezo-actuator, an exhaustive electromechanical characterization of the devices is carried out. A complete description of the microfabrication processes is also provided. As shown in Chapter IV, standard microfabrication techniques are employed to fabricate the array of DSDTs. The overall microfabrication process involves deposition of metal and piezoelectric films, photolithography and plasma-based dry and wet etching to pattern thin films with the desired features. The DSDT devices are designed and developed according to FEM and theoretical analysis and following the typical requirements of force/pressure systems for tactile applications. Experimental analyses are also accomplished to extract the relationship between the compressive residual stress due to the aluminum nitride and the geometries of the devices. They reveal different deformations, proving the dependence of the geometrical features of the three-dimensional structures on residual stress. Moreover, electrical characterization is performed to determine capacitance and impedance of the DSDTs and to experimentally calculate the relative dielectric constant of sputtered AlN piezoelectric film. In order to investigate the mechanical behaviour of the curved circular transducers, a characterization of the flexural deflection modes of the DSDT membranes is carried out. The natural frequency of vibrations and the corresponding displacements are measured by a Laser Doppler Vibrometer when a suitable oscillating voltage, with known amplitude, is applied to drive the piezo-DSDTs. Finally, being developed for tactile sensing purpose, the proposed technology is tested in order to explore the electromechanical response of the device when impulsive dynamic and/or long static forces are applied. The study on the impulsive dynamic and long static stimuli detection is then performed by using an ad hoc setup measuring both the applied loading forces and the corresponding generated voltage and capacitance variation. These measurements allow a thorough test of the sensing abilities of the AlN-based DSDT cells. Finally, as stated in Chapter V, the proposed technology exhibits an improved electromechanical coupling with higher mechanical deformation per unit energy compared with the conventional plate structures, when the devices are used as piezo-actuator. On the other hand, it is well suited to realize large area tactile sensors for robotics applications, opening up new perspectives to the development of latest generation biomimetic sensors and allowing the design and the fabrication of miniaturized devices

Direct Scaling of Measure on Vortex Shedding through a Flapping Flag Device in the Open Channel around a Cylinder at Re ∼ 10^3: Taylor’s Law Approach.

none8noThe problem of vortex shedding, which occurs when an obstacle is placed in a regular flow, is governed by Reynolds and Strouhal numbers, known by dimensional analysis. The present work aims to propose a thin films-based device, consisting of an elastic piezoelectric flapping flag clamped at one end, in order to determine the frequency of vortex shedding downstream an obstacle for a flow field at Reynolds number Re∼103 in the open channel. For these values, Strouhal number obtained in such way is in accordance with the results known in literature. Moreover, the development of the voltage over time, generated by the flapping flag under the load due to flow field, shows a highly fluctuating behavior and satisfies Taylor’s law, observed in several complex systems. This provided useful information about the flow field through the constitutive law of the device.openSamuele De Bartolo, Massimo De Vittorio, Antonio Francone, Francesco Guido, Elisa Leone, Vincenzo Mariano Mastronardi, Andrea Notaro, Giuseppe Roberto TomasicchioDE BARTOLO, Samuele; DE VITTORIO, Massimo; Francone, Antonio; Guido, Francesco; Leone, Elisa; Mariano Mastronardi, Vincenzo; Notaro, Andrea; Tomasicchio, Giusepp

Captive-air-bubble aerophobicity measurements of antibiofouling coatings for underwater MEMS devices:

In this article, we report the measurement of underwater aerophobicity, through the captive-bubble method, for different polymeric coatings employed to protect microscale and nanoscale flexible electronic devices for seawater applications. Controlling the morphology and wettability of the coating, in particular with the incorporation of nanoparticles of fluorinated polymers, allows to adjust the hydrophilic/hydrophobic (aerophobic/aerophilic) character of the surface in order to achieve a more insulating and antibiofouling behavior. Morphological analysis (roughness) and wettability measurements in sessile-drop and captive-bubble methods were provided for some properly selected polymeric coatings. We found that parylene C decorated with poly(vinylidene fluoride) nanoparticles at a higher dispersion concentration (5 mg/mL) exhibits the best compromise between morphology, hydrophobicity, and underwater aerophobicity, with sessile-drop water contact angle of 95.1 ± 2.9° and captive-air-bubble contact angle of 133.1 ± 5.9°

Monitoring Cardiovascular Physiology using Bio-compatible AlN Piezoelectric Skin Sensors

Arterial pulse waves contain a wealth of parameters indicative of cardiovascular disease. As such, monitoring them continuously and unobtrusively can provide health professionals with a steady stream of cardiovascular health indices, allowing for the development of efficient, individualized treatments and early cardiovascular disease diagnosis solutions. Blood pulsations in superficial arteries cause skin surface deformations, typically undetectable to the human eye; therefore, Microelectromechanical systems (MEMS) can be used to measure these deformations and thus create unobtrusive pulse wave monitoring devices. Miniaturized ultrathin and flexible Aluminium Nitride (AlN) piezoelectric MEMS are highly sensitive to minute mechanical deformations, making them suitable for detecting the skin deformations caused by cardiac events and consequently providing multiple biomarkers useful for monitoring cardiovascular health and assessing cardiovascular disease risk. Conventional wearable continuous pulse wave monitoring solutions are typically large and based on technologies limiting their versatility. Therefore, we propose the adoption of 29.5 μm-thick biocompatible, skin-conforming devices on piezoelectric AlN to create versatile, multipurpose arterial pulse wave monitoring devices. In our initial trials, the devices are placed over arteries along the wrist (radial artery), neck (carotid artery), and suprasternal notch (on the chest wall and close to the ascending aorta). We also leverage the mechano-acoustic properties of the device to detect heart muscle vibrations corresponding to heart sounds S1 and S2 from the suprasternal notch measurement site. Finally, we characterize the piezoelectric device outputs observed with the cardiac cycle events using synchronized electrocardiogram (ECG) reference signals and provide information on heart rate, breathing rate, and heart sounds. The extracted parameters strongly agree with reference values as illustrated by minimum Pearson correlation coefficients (r) of 0.81 for pulse rate and 0.95 for breathing rate

Infected pancreatic necrosis: outcomes and clinical predictors of mortality. A post hoc analysis of the MANCTRA-1 international study

: The identification of high-risk patients in the early stages of infected pancreatic necrosis (IPN) is critical, because it could help the clinicians to adopt more effective management strategies. We conducted a post hoc analysis of the MANCTRA-1 international study to assess the association between clinical risk factors and mortality among adult patients with IPN. Univariable and multivariable logistic regression models were used to identify prognostic factors of mortality. We identified 247 consecutive patients with IPN hospitalised between January 2019 and December 2020. History of uncontrolled arterial hypertension (p = 0.032; 95% CI 1.135-15.882; aOR 4.245), qSOFA (p = 0.005; 95% CI 1.359-5.879; aOR 2.828), renal failure (p = 0.022; 95% CI 1.138-5.442; aOR 2.489), and haemodynamic failure (p = 0.018; 95% CI 1.184-5.978; aOR 2.661), were identified as independent predictors of mortality in IPN patients. Cholangitis (p = 0.003; 95% CI 1.598-9.930; aOR 3.983), abdominal compartment syndrome (p = 0.032; 95% CI 1.090-6.967; aOR 2.735), and gastrointestinal/intra-abdominal bleeding (p = 0.009; 95% CI 1.286-5.712; aOR 2.710) were independently associated with the risk of mortality. Upfront open surgical necrosectomy was strongly associated with the risk of mortality (p < 0.001; 95% CI 1.912-7.442; aOR 3.772), whereas endoscopic drainage of pancreatic necrosis (p = 0.018; 95% CI 0.138-0.834; aOR 0.339) and enteral nutrition (p = 0.003; 95% CI 0.143-0.716; aOR 0.320) were found as protective factors. Organ failure, acute cholangitis, and upfront open surgical necrosectomy were the most significant predictors of mortality. Our study confirmed that, even in a subgroup of particularly ill patients such as those with IPN, upfront open surgery should be avoided as much as possible. Study protocol registered in ClinicalTrials.Gov (I.D. Number NCT04747990)

Wearable Sensors and Smart Devices to Monitor Rehabilitation Parameters and Sports Performance: An Overview

A quantitative evaluation of kinetic parameters, the joint’s range of motion, heart rate, and breathing rate, can be employed in sports performance tracking and rehabilitation monitoring following injuries or surgical operations. However, many of the current detection systems are expensive and designed for clinical use, requiring the presence of a physician and medical staff to assist users in the device’s positioning and measurements. The goal of wearable sensors is to overcome the limitations of current devices, enabling the acquisition of a user’s vital signs directly from the body in an accurate and non–invasive way. In sports activities, wearable sensors allow athletes to monitor performance and body movements objectively, going beyond the coach’s subjective evaluation limits. The main goal of this review paper is to provide a comprehensive overview of wearable technologies and sensing systems to detect and monitor the physiological parameters of patients during post–operative rehabilitation and athletes’ training, and to present evidence that supports the efficacy of this technology for healthcare applications. First, a classification of the human physiological parameters acquired from the human body by sensors attached to sensitive skin locations or worn as a part of garments is introduced, carrying important feedback on the user’s health status. Then, a detailed description of the electromechanical transduction mechanisms allows a comparison of the technologies used in wearable applications to monitor sports and rehabilitation activities. This paves the way for an analysis of wearable technologies, providing a comprehensive comparison of the current state of the art of available sensors and systems. Comparative and statistical analyses are provided to point out useful insights for defining the best technologies and solutions for monitoring body movements. Lastly, the presented review is compared with similar ones reported in the literature to highlight its strengths and novelties

A Waste-produced Floor with Solar and Mechanical Energy Harvesters to Power Charging Stations or OLED Lighting Systems

This paper aims to describe the design of a smart floor prototype that includes innovative tiles based on inert, odourless, and sanitized material, achieved through the recycling and transformation of organic and inorganic wastes. Moreover, the smart floor is designed to scavenge energy from solar and mechanical sources by integrating solar panels (on the tile top) and piezoelectric harvesters (on the bottom). The smart tile robustness allows being employed in outdoor environments, where the harvested and stored energy can be used in e-charging stations to power consumer electronic devices or OLED-based street lightings. During a 12 h long working cycle, a 10 m2 smart floor can provide a 160 Ah charge from solar panels with an average daily illuminance of 35000 lx and up to 250-300 mAh from piezo-harvesters (trampling rate of 0.4 Hz)

Human–Machine Interaction through Advanced Haptic Sensors: A Piezoelectric Sensory Glove with Edge Machine Learning for Gesture and Object Recognition

Human–machine interaction (HMI) refers to systems enabling communication between machines and humans. Systems for human–machine interfaces have advanced significantly in terms of materials, device design, and production methods. Energy supply units, logic circuits, sensors, and data storage units must be flexible, stretchable, undetectable, biocompatible, and self-healing to act as human–machine interfaces. This paper discusses the technologies for providing different haptic feedback of different natures. Notably, the physiological mechanisms behind touch perception are reported, along with a classification of the main haptic interfaces. Afterward, a comprehensive overview of wearable haptic interfaces is presented, comparing them in terms of cost, the number of integrated actuators and sensors, their main haptic feedback typology, and their future application. Additionally, a review of sensing systems that use haptic feedback technologies—specifically, smart gloves—is given by going through their fundamental technological specifications and key design requirements. Furthermore, useful insights related to the design of the next-generation HMI devices are reported. Lastly, a novel smart glove based on thin and conformable AlN (aluminum nitride) piezoelectric sensors is demonstrated. Specifically, the device acquires and processes the signal from the piezo sensors to classify performed gestures through an onboard machine learning (ML) algorithm. Then, the design and testing of the electronic conditioning section of AlN-based sensors integrated into the smart glove are shown. Finally, the architecture of a wearable visual-tactile recognition system is presented, combining visual data acquired by a micro-camera mounted on the user’s glass with the haptic ones provided by the piezoelectric sensors

Novel Flexible Triboelectric Nanogenerator based on Metallized Porous PDMS and Parylene C

Triboelectric nanogenerators (TENGs) have recently become a powerful technology for energy harvesting and self-powered sensor networks. One of their main advantages is the possibility to employ a wide range of materials, especially for fabricating inexpensive and easy-to-use devices. This paper reports the fabrication and preliminary characterization of a novel flexible triboelectric nanogenerator which could be employed for driving future low power consumption wearable devices. The proposed TENG is a single-electrode device operating in contact-separation mode for applications in low-frequency energy harvesting from intermittent tapping loads involving the human body, such as finger or hand tapping. The novelty of the device lies in the choice of materials: it is based on a combination of a polysiloxane elastomer and a poly (para-xylylene). In particular, the TENG is composed, sequentially, of a poly (dimethylsiloxane) (PDMS) substrate which was made porous and rough with a steam-curing step; then, a metallization layer with titanium and gold, deposited on the PDMS surface with an optimal substrate–electrode adhesion. Finally, the metallized structure was coated with a thin film of parylene C serving as friction layer. This material provides excellent conformability and high charge-retaining capability, playing a crucial role in the triboelectric process; it also makes the device suitable for employment in harsh, wet environments owing to its inertness and barrier properties. Preliminary performance tests were conducted by measuring the open-circuit voltage and power density under finger tapping (~2 N) at ~5 Hz. The device exhibited a peak-to-peak voltage of 1.6 V and power density peak of 2.24 mW/m2 at ~0.4 MΩ. The proposed TENG demonstrated ease of process, simplicity, cost-effectiveness, and flexibility